Comparison ledger
KLA Archer 10 XT Overlay, KLA P-15, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-15KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | KLA P-15 |
| Specifications | ||
| Configuration | During refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1] | — |
| Wafer size | 200mm dual port open wafer handler[1] | — |
| OEM | KLA[2] | — |
| Model | Archer 10 XT Overlay[2] | — |
| Category | Metrology & Inspection[2] | — |
| Description | 200mm overlay metrology system[2] | — |
| Software version | 5.6[1] | Profiler v6.41[5] |
| Wafer handler | 200mm dual port open wafer handler[1] | — |
| Chuck | 8" chuck[1] | — |
| Computer upgrade | XP computer upgrade[1] | — |
| Computer | KLASS RS2 computer[1] | — |
| Sample table | — | 200 mm sample table with vacuum[3] |
| Measurement range | — | Measures steps from 100 Å to 300 µm[3] |
| Maximum sample thickness | — | 20 mm[3] |
| Minimum sample length | — | 25 mm[3] |
| Tool type | — | Profilometer[4] |
| Measurement capabilities | — | Measures roughness, waviness, step height, and other surface characteristics[5] |
| Wafer capability | — | Up to 8"/200mm wafer capable[5] |
| Control platform | — | Windows NT[5] |
| Automation | — | Computer controlled; automatic measurement capability[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →