Comparison ledger
Lam Research Alliance A 6 TCP 9600 PTX Metal, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alliance A 6 TCP 9600 PTX MetalLam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Alliance A 6 TCP 9600 PTX Metal | Tegal 1512e |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Voltage | 208 Vac[1] | — |
| OEM | Lam Research[2] | — |
| Model | Alliance A 6 TCP 9600 PTX Metal[2] | — |
| Category | Etch[3] | — |
| Wafer size | 8 inch[2] | — |
| Power & electrical | 3 Phase - 4 Wire + Ground - 208 Vac[2] | — |
| Chambers | (2) 9600PTX Chambers[2] | — |
| Tool type | — | Industrial RIE plasma etcher system[4] |
| Stated configuration | — | With modules assembly for CI-4222[4] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →