Comparison ledger
Lam Research Gasonics L 3500, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gasonics L 3500Lam Research | 1000FPYES |
|---|---|---|
| OEM | Lam Research | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Gasonics L 3500 | YES 1000FP |
| Specifications | ||
| Process type | Plasma Asher[1] | — |
| Wafer size | 12 inch[2] | — |
| Process gases | O2 and N2[1] | — |
| Robot upgrade | HINE Hatm 5.0 atmospheric robot arm[3] | — |
| Weight | 200 kg[3] | — |
| System type | — | Plasma cleaning system[4] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[4] |
| Model | — | Glen/YES 1000FP[4] |
| Designed use | — | Designed to accept a range of shelf sizes[4] |
| Application focus | — | Changing needs of the flat panel industry[4] |
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