Waferpedia

Comparison ledger

IPEC 472versus1 DP 41

Lam Research IPEC 472, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IPEC 472Lam Research
1 DP 41Logitech
OEMLam ResearchLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC 472Logitech 1 DP 41
Specifications
ConfigurationSurface Automated[1]50/60 Hz[4]
Wafer size6 inch, 8 inch[2]—
CategoryCMP (Chemical Mechanical Polisher / Chemical Mechanical Planarization)[1]—
Make / OEMLam / IPEC[1]—
Model472[1]1 DP 41[4]
Phase—3 Phase[4]
Voltage—480 V[4]
Make—Logitech[4]
Frequency—50/60 Hz[4]
Current—12 amps[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing