Waferpedia

Comparison ledger

IPEC AvantGaard 776versus6 DF DC 1

Lam Research IPEC AvantGaard 776, Strasbaugh 6 DF DC 1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: CMP, null[1]
Side-by-side comparison of selected equipment models
Attribute
6 DF DC 1Strasbaugh
OEMLam ResearchStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPECStrasbaugh 6 DF DC 1
Cited variants
  • IPEC AvantGaard 776 Tungsten[2]
  • IPEC AvantGaard 776 (Dielectric)[3]
—
Specifications
ConfigurationDielectric[1]Refurbished[5]
CategoryCMP[3]—
MakeLam / IPEC[2]—
ModelAvantGaard 776[3]—
Wafer size8 inch[2]—
Wafer size (version)200 mm[4]—
ProcessTungsten[2]—
Asset descriptionCMP system for spares use[4]—
Voltage—230 V, Single Phase, 60 Hz[5]
Full Load—15 A[5]
Motor—8.0 A[5]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]inventory listing