Comparison ledger
Lam Research SEZ SP 304, Veeco Waferstorm 3300 M 3303 M 3304 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEZ SP 304Lam Research | |
|---|---|---|
| OEM | Lam Research | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research SEZ | Veeco Waferstorm |
| Specifications | ||
| Configuration | Equipped With:[2] | 40 A[1] |
| Manufacturer | Lam Research[3] | Veeco / SSEC[1] |
| Model | SEZ SP 304[3] | Waferstorm M 3303[1] |
| Tool type | Single wafer processing system[3] | — |
| Category | Wet Processing / Clean[4] | — |
| Wafer Size | 12 inch[3] | — |
| Voltage | — | 208 VAC[5] |
| Phase | — | 3 Phase[5] |
| Frequency | — | 60 Hz[5] |
| Model designation | — | Waferstorm 3300 / M 3303 / M 3304[5] |
| Equipment type | — | single wafer processing system[5] |
| Process category | — | Wet Processing / Clean[5] |
| Wafer size | — | 6 inch[1] |
| Current | — | 40 A[1] |
| Configured for | — | 150mm SSEC/Veeco M3303 solvent (NMP) liftoff system[6] |
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