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Comparison ledger

EDC-650-23BversusWS-750Lz-23B

Laurell EDC-650-23B, Laurell WS-750Lz-23B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMLaurellLaurell
CategoryResist ProcessingResist Processing
Wafer size150mm150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLaurell EDC-650-23BLaurell WS-750Lz-23B
Cited variants—
Specifications
ModelEDC-650-23B[1]—
TypeEDC System[1]spin coater[1]
Controller Series650 Series[1]—
Max Substrate SizeØ150mm (5" × 5")[1]—
Max RPM12,000 rpm[1]12,000 rpm[1]
Mounting OptionsTabletop, In-Deck, On-Deck[1]—
Series—750 Series[1]
Max substrate size—ø150mm (5" x 5")[1]
Mounting options—Tabletop, In-Deck, On-Deck[1]
Model Type—spin coater[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]laurell.comlaurell.com