Comparison ledger
Melles Griot 05 LHP 151, Onto Innovation MetaPulse 200 XCu Metal Film Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 05 LHP 151Melles Griot | MetaPulse 200 XCu Metal Film MeasurementOnto Innovation |
|---|---|---|
| OEM | Melles Griot | Onto Innovation |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | Wafer Mapping |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Melles Griot 05 | Onto Innovation MetaPulse 200 |
| Specifications | ||
| Configuration | With 05 LPL 340 Power Supply (Does not power on)[1] | Non copper tool; double path tool delay stage[3] |
| Equipment type | Laser[1] | — |
| Make | Melles Griot[1] | — |
| Model | 05 LHP 151[1] | — |
| Power state | Does not power on[1] | — |
| Cooling Water Required Minimum Flow | — | 0.79 GPM (3.00 l/m)[3] |
| Min Temp | — | 12 *C (54 *F, 285.00 *K)[3] |
| Max Temp | — | 20 *C (68 *F, 293 *K)[3] |
| Wafer size | — | Wafer Mapping[3] |
| Controller Type | — | PC Controller[3] |
| External Cooling | — | Water Cooled[3] |
| Cooling Water Required | — | Minimum Flow: 0.79 GPM (3.00 l/m) Min Temp: 12 *C (54 *F, 285.00 *K) Max Temp: 20 *C (68 *F, 293 *K)[3] |
| Operating Air Pressure | — | 14.00 PSI (96,534.20 N/sq m)[3] |
| Vacuum Required | — | 0.98 in Hg (24.89 mm Hg)[3] |
Plan your fab
Building a Precision Optics process? Get a complete equipment list.
Open the fab equipment planner →