Comparison ledger
Nikon NSR 2005 G 8 C G Line, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 150 e MaskSUSS MicroTec | |
|---|---|---|
| OEM | Nikon | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 1991– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Make | Nikon[1] | — |
| Model | NSR 2005 G 8 C[1] | — |
| Light source | G-line[1] | — |
| Vintage year | 1991[1] | — |
| Tool type | Stepper[1] | — |
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