Comparison ledger
Ontrak DSS 200 Integrated Circuit, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000PYES | |
|---|---|---|
| OEM | Ontrak | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Ontrak DSS 200 Integrated Circuit | YES 1000P |
| Cited variants | — | |
| Specifications | ||
| Wafer size range | 100mm to 200mm[1] | — |
| Throughput | 45-65 wafers per hour[2] | — |
| Cleaning method | Double-sided PVA scrub[1] | — |
| Brush type | Roller PVA[3] | — |
| Drying method | Spin dry with heat lamp[1] | — |
| Control system | Windows-based[3] | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Brush boxes | Dual[1] | — |
| Ammonia dispense | Yes[1] | — |
| Robotic unload | Yes[1] | — |
| Touchscreen controls | Yes[1] | — |
| Model | — | 1000P[4] |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Power | — | 1000 W[5] |
| Configuration | — | Parallel plate[5] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
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