Comparison ledger
Oxford Instruments Plasmalab 100 RIE, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Plasmalab 100 RIEOxford Instruments | 1512eTegal |
|---|---|---|
| OEM | Oxford Instruments | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments Plasmalab 100 | Tegal 1512e |
| Cited variants | — | |
| Specifications | ||
| Voltage | 208V, 50/60Hz[3] | — |
| Configuration | With VAT PM-5 Adaptive Pressure Controller[3] | — |
| Wafer Size | 6 inch[3] | — |
| RF Generator | Advanced Energy RFX 600A, 600 W @ 13.56 MHz[2] | — |
| Electrode Temperature Range | 10°C to 80°C[2] | — |
| Turbo Pump | Alcatel ATH 400M[2] | — |
| Turbo Pump Controller | Alcatel ACT 600M[2] | — |
| Pressure Controller | VAT PM-5 Adaptive Pressure Controller[3] | — |
| Number of Gas Lines | 6 (with MFCs)[2] | — |
| Installed Gases | Ar, N2, CHF3, NF3, N2O[2] | — |
| Chiller | Thermo Neslab RTE7 Chiller and OptiTemp OTI-5WL-P3-216 Chiller[3] | — |
| Vacuum Pump | Leybold D65BCS Vacuum Pump with oil filter and exhaust filter[3] | — |
| Control System | Windows PC with user-friendly interface and blue PLC control architecture[2] | — |
| Platen Size | 330 mm platen[2] | — |
| Load-locked | Yes[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[4] |
| Stated configuration | — | With modules assembly for CI-4222[4] |
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