Comparison ledger
Pfeiffer TPH 521 PC Turbo, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TPH 521 PC TurboPfeiffer | |
|---|---|---|
| OEM | Pfeiffer | Tri |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Pfeiffer TPH 521 PC Turbo | Tri -Mist 850 Electronic Air Filter |
| Cited variants |
| — |
| Specifications | ||
| Model | TPH 521 PC[2] | — |
| Type | Turbo Pump[3] | — |
| Controller | TC 600 Turbo Pump Controller[4] | — |
| Compatible controllers | DCU-001, DCU-300, TPS-300[3] | — |
| Inlet flange | DN 160 ISO-K[4] | — |
| Inlet | ISO160[1] | — |
| Exhaust | KF25[3] | — |
| Outlet flange | KF-25[4] | — |
| Pumping speed | 430 l/s (N2)[1] | — |
| Compression ratio | > 10^7 (N2)[3] | — |
| Manufacturer | Pfeiffer[2] | — |
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