Comparison ledger
Semitool 003163-000 SRD, Veeco Waferstorm 3300 M 3303 M 3304 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | |
|---|---|---|
| OEM | Semitool | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Veeco Waferstorm |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | Waferstorm M 3303[3] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | single wafer processing system[2] |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Voltage | — | 208 VAC[2] |
| Phase | — | 3 Phase[2] |
| Frequency | — | 60 Hz[2] |
| Configuration | — | 40 A[3] |
| Manufacturer | — | Veeco / SSEC[3] |
| Model designation | — | Waferstorm 3300 / M 3303 / M 3304[2] |
| Process category | — | Wet Processing / Clean[2] |
| Wafer size | — | 6 inch[3] |
| Current | — | 40 A[3] |
| Configured for | — | 150mm SSEC/Veeco M3303 solvent (NMP) liftoff system[4] |
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