Comparison ledger
SUSS MicroTec 150 e Mask, SUSS MicroTec MA 200 Compact Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 150 e MaskSUSS MicroTec | MA 200 Compact MaskSUSS MicroTec |
|---|---|---|
| OEM | SUSS MicroTec | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | Wafer Handler |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec 150 e Mask | SUSS MicroTec MA 200 |
| Specifications | ||
| Phase | — | 3 Phase +N +PE[1] |
| Configuration | — | 50/60 Hz[1] |
| Voltage | — | 400V[1] |
| Wafer size | — | Wafer Handler[1] |
| Handler Type | — | Robot[1] |
| Gas | — | N2[1] |
| Power | — | 400V[1] |
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