SUSS MicroTec
BA8 Gen4 Pro alternatives
Comparable Lithography equipment documented in the Waferpedia catalog.
6 comparable tools
GCA
AS200
200mm
Lithography
The GCA AutoStep 200 DSW (also known as AS200) is a 5X reduction i-line wafer stepper designed for up to 200mm wafers.
SUSS MicroTec
MA200 Gen3
200mm
Lithography
The SUSS MicroTec MA200 Gen3 is a fully automated mask aligner for high-volume lithography on wafers and square substrates up to 200 mm.
Nikon
NSR 2205 i 14 E 2 i-Line
200mm
Lithography
Nikon NSR 2205 i 14 E 2 is an i-line stepper.
ASML
PAS 5500
200mm
Lithography
The ASML PAS 5500/275D is a high-throughput i-line stepper with 5X reduction, 365 nm exposure, and automated wafer handling for substrates up to 200 mm diameter.
Brooks
017-0024-01 Prealigner
Lithography
Brooks
017-0146-01 Prealigner
Lithography
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
Compare interactively
Need a side-by-side spec table? Open the compare tool to pick any two models.
Compare BA8 Gen4 Pro with another model →