Comparison ledger
SUSS MicroTec GT200, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GT200SUSS MicroTec | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | SUSS MicroTec | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec GT200 | Thermo Fisher 1300 |
| Specifications | ||
| Chemical consumption | Significantly lower compared to conventional processes[1] | — |
| Hazardous acids | None used[1] | — |
| Organic solvents | None used[1] | — |
| Wafer size | up to 200 mm[2] | — |
| Throughput | up to 45 wafers per hour[2] | — |
| Particle removal efficiency | 99% for particles >100 nm[2] | — |
| Available modules | TurbulenStrip, CrustBuster, SpinRinseDry[3] | — |
| General dimensions (w x d x h) | 237 x 420 x 230 cm[3] | — |
| Supported wafer materials | Si, SiC, and more[3] | — |
| Robot system | dual arm robot[3] | — |
| Configuration | — | Class II[4] |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[5] |
| Airflow compensation | — | SmartFlow airflow compensation system[5] |
| Motors | — | Dual DC motors[5] |
| Front window design | — | SmartClean front window design[5] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[5] |
| UV light | — | Programmable UV light[5] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[5] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[5] |
| Front opening choices | — | 8-inch or 10-inch front opening[5] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[6] |
| Certification | — | NSF/ANSI 49, UL, CE[6] |
| Service valves | — | Up to 6 total, 3 on each side wall[6] |
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