Waferpedia

Comparison ledger

1300 Series Safetyversus1000P

Thermo Fisher 1300 Series Safety, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1300 Series SafetyThermo Fisher
OEMThermo FisherYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2026 Third-party support only1998 Acquisition
Control system——
Generation——
FamilyThermo Fisher 1300YES 1000P
Specifications
ConfigurationClass II[1]Parallel plate[5]
Cabinet typeClass II, Type A2 biological safety cabinet[2]—
Airflow compensationSmartFlow airflow compensation system[2]—
MotorsDual DC motors[2]—
Front window designSmartClean front window design[2]—
Control panelIntuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2]—
UV lightProgrammable UV light[2]—
SmartPortSmartPort convenience for routing tubing and cables through the side walls[2]—
Available widths3-foot, 4-foot, 5-foot, and 6-foot sizes[2]—
Front opening choices8-inch or 10-inch front opening[2]—
Filter specificationH14 HEPA filters, EN 1822, 99.995% @ MPPS[3]—
CertificationNSF/ANSI 49, UL, CE[3]—
Service valvesUp to 6 total, 3 on each side wall[3]—
Model—1000P[4]
System type—Plasma cleaning system[4]
Shelf configuration—Four 16 x 16 inch shelves[4]
Total capacity—1024 square inches[4]
Control system—PLC driven with plain English real time process readout and diagnostics in the event of system abort[4]
Number of shelves—4[4]
Shelf size—16 x 16 inches[4]
Power—1000 W[5]
Operation modes—Active, RIE, Downstream[4]
Sample size range—From smallest semiconductor chip to large flat panels[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]thermofisher.comthermofisher.com
  3. [3]documents.thermofisher.comdocuments.thermofisher.com
  4. [4]web.archive.orgweb.archive.org
  5. [5]semistarcorp.comsemistarcorp.com