Comparison ledger
Ultratech 1000 Family, Ultratech XLS 7500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | XLS 7500Ultratech |
|---|---|---|
| OEM | Ultratech | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Ultratech 1000 Family | Ultratech XLS 7500 |
| Specifications | ||
| Tool type | Photolithography step-and-repeat 1X stepper[1] | — |
| Optical design | Wynne Dyson[1] | — |
| Magnification | 1X[1] | — |
| Light source | — | i-line[2] |
| Resolution | — | 0.50 µm[2] |
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