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Comparison ledger

Waferstorm 3300 M 3303 M 3304 Single Wafer Processingversus1000FP

Veeco Waferstorm 3300 M 3303 M 3304 Single Wafer Processing, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMVeecoYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVeeco WaferstormYES 1000FP
Specifications
Voltage208 VAC[1]—
Phase3 Phase[1]—
Frequency60 Hz[1]—
Configuration40 A[2]—
ManufacturerVeeco / SSEC[2]—
ModelWaferstorm M 3303[2]Glen/YES 1000FP[4]
Model designationWaferstorm 3300 / M 3303 / M 3304[1]—
Equipment typesingle wafer processing system[1]—
Process categoryWet Processing / Clean[1]—
Wafer size6 inch[2]—
Current40 A[2]—
Configured for150mm SSEC/Veeco M3303 solvent (NMP) liftoff system[3]—
System type—Plasma cleaning system[4]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[4]
Designed use—Designed to accept a range of shelf sizes[4]
Application focus—Changing needs of the flat panel industry[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]wotol.comwotol.com
  4. [4]web.archive.orgweb.archive.org