Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards IGX 600 M Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IGX 600 M VacuumEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards IGX 600 M Vacuum |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[3] | — |
| Description | ROBOT[3] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[3] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[3] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[3] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[3] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[3] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[3] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[3] | — |
| Product type | — | Dry pump[4] |
| Vintage | — | 2008[5] |
| Peak speed | — | 600 m3 h-1 (365 cfm, 10,333 L/min)[2] |
| Ultimate pressure | — | 7.00 x 10^-4 mbar (5.25 x 10^-4 Torr, 0.07 Pa)[2] |
| Power at 700 Torr exhaust ultimate | — | 1.6 kW[2] |
| Active Utility Controller power | — | 0.05 kW[2] |
| Water inlet | — | 2 slm[2] |
| Nitrogen | — | 0 slm[2] |
| Footprint excluding exhaust | — | 0.20 m2[2] |
| Weight | — | 220 kg (485 lbs)[2] |
| Inlet connection | — | ISO100[2] |
| Outlet connection | — | NW25[2] |
| Exhaust connection | — | KF25[4] |
| Noise at ultimate | — | < 55 dB(A)[2] |
| Input voltage options | — | 200 V-230 V 50/60 Hz; 380 V-460 V 50/60 Hz[1] |
| Pumping speed | — | 600 m³/h (365 CFM)[2] |
| Power consumption (at 700 Torr exhaust) | — | 1.6 kW[2] |
| AUC power | — | 0.05 kW[2] |
| Water inlet flow | — | 2 slm[2] |
| Nitrogen flow | — | 0 slm[2] |
| Footprint (excluding exhaust) | — | 0.20 m²[2] |
| Noise level (at ultimate) | — | < 55 dB(A)[2] |