Comparison ledger
Advanced Energy Apex 1513, Applied Materials 0010-22161 High EFF RF Match, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Apex 1513Advanced Energy | 0010-22161 High EFF RF MatchApplied Materials |
|---|---|---|
| OEM | Advanced Energy | Applied Materials |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Advanced Energy Apex 1513 | Applied Materials 0010-22161 High EFF RF Match |
| Specifications | ||
| Part Number | 0190-19022-001 Model Number: 3156110-005[1] | — |
| Manufacturer | Advanced Energy[1] | — |
| Model | APEX-1513[1] | 0010-22161[8] |
| Description | Generator[4] | HTESC PH 1 REV A[9] |
| Version | Spares[1] | — |
| Quantity | 1[4] | — |
| Model Number | 3156110-005[1] | — |
| Output Power | 1500 W (1.5 kW)[5] | — |
| Frequency | 13.56 MHz[5] | — |
| Frequency Accuracy | ±0.005%[5] | — |
| RF Output Connector | N female[5] | — |
| Cooling | Forced air[5] | — |
| Communication Interfaces | Analog, RS-232/RS-485, DeviceNet, EtherCAT optional[5] | — |
| Input Voltage (Single-Phase) | 208 V AC, single phase[5] | — |
| Input Voltage (Three-Phase) | 3ɸ, 208 V AC, 50/60 Hz[6] | — |
| Weight | 15.9 kg (35 lbs)[5] | — |
| Weight (Alternate) | 35 kg[7] | — |
| Dimensions (H x W x D) | 88 x 483 x 508 mm (3.5 x 19 x 20 in)[5] | — |
| Country of Origin | USA[5] | — |
| Certifications | CE, UL, RoHS[5] | — |
| Make | — | Applied Materials[8] |
| Condition | — | Used[9] |
| Stock Number | — | BM6628[9] |