Waferpedia

Comparison ledger

RFX 2500versusRFX 600

Advanced Energy RFX 2500, Advanced Energy RFX 600, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
RFX 2500Advanced Energy
RFX 600Advanced Energy
OEMAdvanced EnergyAdvanced Energy
Category——
Wafer size——
Process node——
Introduced——
Production run——
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FamilyAdvanced Energy RFXAdvanced Energy RFX
Cited variants—
  • RFX 600 with ATX 600[1]
  • RFX 600 / 5002-000-B[2]
  • 5002-000-B[2]
  • RFX 600 Model 5002-000-B[2]
Specifications
Voltage208 V 30[3]—
Configuration50/60 Hz[3]Power cord needs replacing[4]
Power—600 W[5]
Frequency—13.56 MHz[5]
Certification—CE[5]
Power Correction Factor—Included[5]
Model Number—5002-000-B[2]
Output Power—600 W[5]
Feature—Power Correction Factor[5]
Power output—600 W[5]
CE compliance—Yes[5]
Power correction factor—Yes[5]
Type—RF Power Supply / RF Generator[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]web.archive.orgweb.archive.org