Comparison ledger
Applied Materials 0010-03254 E Chuck, Cascade Microtech EPS150TRIAX, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | EPS150TRIAXCascade Microtech |
|---|---|---|
| OEM | Applied Materials | Cascade Microtech |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Cascade Microtech EPS150TRIAX |
| Specifications | ||
| OEM | — | Cascade MicroTech[1] |
| Model | — | EPS150TRIAX[1] |
| Equipment type | — | Probe Station[1] |
| Enclosure | — | Light shield enclosure[1] |
| Measured quantities | — | Current, voltage, resistance, capacitance, conductance[1] |
| Capacitance and conductance measurement range | — | 20 Hz to 1 MHz[1] |
| Applications | — | I-V characterization; low current measurements; C-V characterization (at multiple frequencies); resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[1] |
| Microscope | — | Trinocular 6.7x stereo zoom microscope with 100x magnification[1] |
| Motion axes | — | Micropositioner movement in x, y, and z[1] |