Waferpedia

Comparison ledger

0010-03254 E ChuckversusTSA 71 S Thermal Shock

Applied Materials 0010-03254 E Chuck, ESPEC TSA 71 S Thermal Shock, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsESPEC
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—ESPEC TSA
Specifications
Voltage—200V[1]
Configuration—50/60Hz[1]
Make—ESPEC[1]
Model—TSA 71 S[1]
Equipment Type—Thermal Shock Chamber[1]
Electrical—200V - 50/60Hz - Max. 80Amps[1]
Vintage—2005[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing