Comparison ledger
Applied Materials 0010-03254 E Chuck, Nova 3090, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | 3090Nova |
|---|---|---|
| OEM | Applied Materials | Nova |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Nova 3090 |
| Specifications | ||
| OEM | — | Nova[1] |
| Model | — | 3090[1] |
| Category | — | CMP metrology system[2] |
| Wafer size | — | 300 mm[2] |
| Channel | — | single polarized channel[2] |
| Spectral range | — | Deep-UV to Near-IR[2] |
| Applications | — | Poly, STI, Tungsten plugs, Copper interconnect[2] |
| Measurement capabilities | — | solid areas, 2D structures, 3D shape characterization, thickness and shape of dielectric materials, low-K materials[2] |
| Process capability | — | high-end 65nm and 45nm CMP applications[2] |