Comparison ledger
Applied Materials 0010-03254 E Chuck, Onto Innovation AXI 930, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | AXI 930Onto Innovation |
|---|---|---|
| OEM | Applied Materials | Onto Innovation |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Onto Innovation AXI 930 |
| Specifications | ||
| Chamber | — | AXI-1007[1] |
| Type | — | Macro Inspection System[2] |
| Detection capability | — | Wafer-level and die-level defects[2] |
| Wafer size | — | 8" (200 mm)[2] |
| Load ports | — | 2[2] |
| Alternative model designation | — | AXI-930[2] |