Waferpedia

Comparison ledger

0010-03254 E ChuckversusSD12

Applied Materials 0010-03254 E Chuck, SUSS MicroTec SD12, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
SD12SUSS MicroTec
OEMApplied MaterialsSUSS MicroTec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—SUSS MicroTec SD12
Specifications
Class—Manual system[1]
Wafer size—up to 300 mm[1]
Process type—Coating / Developing[1]
Processes—Solvent Processes; Puddle / Spray Developing; Lift-off; Wafer Cleaning[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]hilpert.chhilpert.ch