Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusEPS150TRIAX

Applied Materials 0010-03485 Magnet Assy, Cascade Microtech EPS150TRIAX, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
EPS150TRIAXCascade Microtech
OEMApplied MaterialsCascade Microtech
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyCascade Microtech EPS150TRIAX
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]Cascade MicroTech[5]
Model0010-03485[1]EPS150TRIAX[5]
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Equipment type—Probe Station[5]
Enclosure—Light shield enclosure[5]
Measured quantities—Current, voltage, resistance, capacitance, conductance[5]
Capacitance and conductance measurement range—20 Hz to 1 MHz[5]
Applications—I-V characterization; low current measurements; C-V characterization (at multiple frequencies); resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[5]
Microscope—Trinocular 6.7x stereo zoom microscope with 100x magnification[5]
Motion axes—Micropositioner movement in x, y, and z[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]smif.pratt.duke.edusmif.pratt.duke.edu