Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusNE 950

Applied Materials 0010-16392 ESC Assembly, Ulvac NE 950, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
NE 950Ulvac
OEMApplied MaterialsUlvac
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyUlvac NE 950
Cited variants—
  • NE 950 EX ICP[1]
  • NE 950 ICP-RIE[1]
Specifications
OEMApplied Materials[2]—
Model0010-16392[2]NE 950[4]
TypeESC Assembly[2]—
Wafer Size300 mm[3]—
Electrode ConfigurationDual[3]—
Manufacturer—Ulvac[4]
Category—Etch[5]
Tool type—ICP-RIE (Inductively Coupled Plasma - Reactive Ion Etch) system[5]
Wafer description—chamber described for 2" to 12" wafers[5]
Process type—ICP-RIE (Inductively Coupled Plasma - Reactive Ion Etch)[5]
Wafer size—2" to 12" wafers[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]spwindustrial.comspwindustrial.com
  4. [4]Equipment inventory listing
  5. [5]waferpedia.comwaferpedia.com