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0010-18024 Pyrometer AssemblyversusD 8 Fabline

Applied Materials 0010-18024 Pyrometer Assembly, Bruker D 8 Fabline, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBruker
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer chuck and standard sample holder
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyBruker D 8 Fabline
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Pattern recognition software[2]
Handler System—Automation software PTO from Peer Group[2]
Software Version—77-2.3A-6A-5A-5A-R6A[2]
Scanning range of two theta—min. 28° – max. 99°, Omega is limited to min. 30° max. 80°  to avoid collision with 300mm wafer chuck[2]
Wafer size—Wafer chuck and standard sample holder[2]
X-ray source—TXS point focus (50kV 50mA) generator installed in the electronic cabinet behind the tool[2]
Two theta scanning range—28° – 99°[2]
Omega range—30° – 80°[2]
Detector—LynxEye XE[2]
Stage—Multi-sample holder with wafer chuck for 300mm wafers and standard Bruker sample holder[2]
Slits—Motorized slits and fixed slit 2mm primary side[2]
Automation—Fully automated with automation software PTO from Peer Group[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing