Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Bruker Dektak 150 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | Dektak 150 SurfaceBruker |
|---|---|---|
| OEM | Applied Materials | Bruker |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Bruker Dektak 150 Surface |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | — |
| Manufacturer | — | Bruker / Veeco[2] |
| Model | — | Dektak 150[2] |
| Type | — | Surface profilometer[2] |
| Description | — | Advanced thin and thick film step height measurement tool[3] |
| Measurement capabilities | — | Surface topography, waviness, and surface roughness[3] |
| Step-height repeatability | — | 0.6 nm[3] |
| Maximum substrate size | — | 6 inch[3] |
| Sample dimension | — | up to six inches in dimension[3] |
| Sample thickness | — | up to four inches thick[3] |
| Stage | — | Single-axis 4-inch Y auto stage[3] |
| 3D imaging | — | Enables mapping of 3D images[3] |
| Vertical resolution | — | 1 Ångström[4] |
| Vertical range | — | 524 µm[4] |
| Stylus radius | — | 12.5 µm, 5.0 µm, 2.5 µm[4] |
| Measurement method | — | Contact stylus[5] |
| Maximum sample size | — | 150 mm (6-inch)[5] |
| Scan length | — | 55 mm[5] |
| Optional vertical range | — | 1 mm[5] |
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