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0010-18024 Pyrometer AssemblyversusS 4800 I

Applied Materials 0010-18024 Pyrometer Assembly, Hitachi S 4800 I, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
S 4800 IHitachi
OEMApplied MaterialsHitachi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyHitachi S 4800
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Tilt motion:-5° to +70°[2]
Main body—1set including Tip, Objective aperture, Ion Pump, SE detection etc.[2]
Diplay unit—1set including PC, monitor, keyboard, mouse, etc[2]
Chiller—Option if there is no water source[2]
Resolution—1.0 nm (Accelerating voltage: 15 kV, WD: 4mm; 2.0 nm (Accelerating voltage: 1 kV, WD: 1.5 mm)[2]
Magnification—30 to 2,000x in LM mode; 100 to 800,000 in HM mode[2]
Resolution (15 kV, WD 4mm)—1.0 nm[2]
Resolution (1 kV, WD 1.5 mm)—2.0 nm[2]
Magnification (LM mode)—30 to 2,000x[2]
Magnification (HM mode)—100 to 800,000x[2]
Tilt motion—-5° to +70°[2]
Operating system—Windows 2000[2]
Main body components—Tip, Objective aperture, Ion pump, SE detection[2]
Display unit components—PC, monitor, keyboard, mouse[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing