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Comparison ledger

0010-22161 High EFF RF Matchversus310

Applied Materials 0010-22161 High EFF RF Match, EV Group 310, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
310EV Group
OEMApplied MaterialsEV Group
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—unified GUI program platform called EVG CIMFramework
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEV Group 310
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Tool name—EVG 310[3]
Type—single wafer cleaner[3]
Cleaning function—megasonic DI water cleaner[3]
Modules—cleaning module (CLM) and pre-bond station and infrared lamp imaging module (IRM)[3]
Cleaning use—used to clean wafers[3]
Pre-bond use—used to put wafers in contact (prebond)[3]
Imaging use—used to image through the wafer stack with infrared illumination to look for bonding defects (voids)[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]epfl.chepfl.ch