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0010-22161 High EFF RF Matchversus8626

Applied Materials 0010-22161 High EFF RF Match, SVG 8626, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
8626SVG
OEMApplied MaterialsSVG
Category——
Wafer size——
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Introduced——
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FamilyApplied Materials 0010-22161 High EFF RF MatchSVG 8626
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]8626[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Cassette to cassette[3]
OEM—SVG[3]
Wafer size—6 inch[3]
Coat stages—2 coat[3]
Excludes—Pumps[3]
Process—2 coat[3]
Includes—Excludes pumps[3]
Facility equipment listing—SVG 8626 6" Lift-Off resist and BARC Coat Track[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]nanolab.berkeley.edunanolab.berkeley.edu