Comparison ledger
Applied Materials 0041-39086 ESC Part, Plasma-Therm Unaxis 790 RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | Unaxis 790 RIEPlasma-Therm |
|---|---|---|
| OEM | Applied Materials | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Plasma-Therm Unaxis 790 |
| Specifications | ||
| Configuration | — | Gases:[1] |
| Wafer size | — | 6 inch[1] |
| Process gases | — | SF6, CHF3, CF4, O2, He, Ar, N2[1] |
| RF source frequency | — | 13.56 MHz[1] |
| Tool type | — | Reactive Ion Etcher (RIE)[1] |
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