Waferpedia

Comparison ledger

5500 100 Dversus150 e Mask

Applied Materials 5500 100 D, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
5500 100 DApplied Materials
150 e MaskSUSS MicroTec
OEMApplied MaterialsSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 5500 100 DSUSS MicroTec 150 e Mask
Specifications
equipmentTypeStepper / Scanner[1]—
categoryLithography[2]—
vintageYear1996[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com