Comparison ledger
Applied Materials E 500 EHPI Medium Current, Axcelis NV 8250, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | E 500 EHPI Medium CurrentApplied Materials | NV 8250Axcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | Wafer Position Detect | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials E 500 | Axcelis NV 8250 |
| Specifications | ||
| Loading Configuration | Open Cassette[2] | — |
| Software | V 13.30 rev D[3] | — |
| Floppy Drive Type | 3.5"[3] | — |
| Configuration | CE Mark[3] | Backside[4] |
| Energy Range | 10 KeV - 200 KeV[2] | 0-250 keV[1] |
| Solid State Scanner | 30 KV[3] | — |
| Gas Box Type | HP[2] | — |
| Computer Type | Pentium[3] | — |
| OEM | Applied Materials / Varian[3] | — |
| Model | E 500 EHPI[2] | — |
| Category | Ion Implantation[2] | — |
| Wafer Sizes | 6 inch[3] | 8 inch[1] |
| Load Lock Turbo | V 300 HT[3] | — |
| Source Zone Turbo Pump | STP 1000[3] | — |
| Scanner Turbo Pump | STP 1000[3] | — |
| Analyzer Turbo Pump | V 300 HT[3] | — |
| Vacuum Pumps (3) | Edwards QDP 80, QMB 250[3] | — |
| Pump Type | Dry[3] | — |
| Wafer size | Wafer Position Detect[3] | — |
| Wafer size / detect | Wafer Position Detect[2] | — |
| Scanner | Solid State Scanner, 30 KV[3] | — |
| Control interface | GEM/SECS; SECS II Interface[3] | — |
| Power Requirement | — | 208 VAC, 100 A, 50/60 Hz, 3 Phase[1] |
| Programmable Auto Tilt | — | 0-75 degrees[1] |
| Single Stage Extraction | — | 15-40 keV[1] |
| Ion Source Type | — | ELS[1] |
| Source Material Type | — | Moly[1] |
| Electrostatic Chuck (ESC) | — | Yes[1] |
| Parallel Beam using Hybrid Scanning | — | Yes[1] |
| 90 degrees Radially Indexed Dipole Magnet | — | Yes[1] |
| Signal Tower | — | Yes[1] |
| SECS II / GEM Interface | — | Yes[1] |
| Cassette Interface | — | Asyst Bolt-On SMIF (2), Cassette Stages (3), Automatic Flat/Notch Alignment, Programmable Flat Orient[1] |
| Controller | — | Sun Sparc Station V, Application SW Ver. 4.3.2, Auto Start-Up & Computer Monitoring[1] |
| Pump / Cryogenics | — | Source Pump: TMP; Beam Pump: TMP (2) and Cryo Pump (8" Torr, Non On-board); End Station Pump: 2 Cryo Pump (8" Torr, Non On-Board); Cryo Compressor: CTI 8500; Remote Disk Chiller[1] |
| Gas Configuration | — | AsH3 - SDS, PH3 - SDS, BF3 - SDS, Ar - HP[1] |
| Energy Filter System Option | — | Yes[1] |
| Vintage | — | 1999 (Backside)[4] |
| Source Pump | — | TMP[1] |
| Beam Pump | — | TMP (2)[1] |
| End Station Pump | — | 2 Cryo Pump (8" Torr, Non On-Board)[1] |
| Cryo Compressor | — | CTI 8500[1] |
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