Comparison ledger
Applied Materials Enabler, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EnablerApplied Materials | 1512eTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2010 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Enabler | Tegal 1512e |
| Cited variants | — | |
| Specifications | ||
| Manufacturer | Applied Materials[3] | — |
| Model | Enabler[3] | — |
| Category | Etcher[3] | — |
| Wafer size | 12 inch[3] | — |
| Description | Dielectric etcher[1] | — |
| Process chambers | 4[1] | — |
| Version | 300 mm[1] | — |
| Configured wafer size | 300 mm[4] | — |
| Process | OX[4] | — |
| Software revision | B2.8_79[4] | — |
| FI software | FB4.70_12[4] | — |
| GEM software | 7.20_17[4] | — |
| Tool type | — | Industrial RIE plasma etcher system[5] |
| Stated configuration | — | With modules assembly for CI-4222[5] |
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