Comparison ledger
Applied Materials PREXT Dry, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PREXT DryApplied Materials | 200 ACUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials PREXT Dry | Axcelis NV GSD 200 |
| Specifications | ||
| Configuration | — | Parts Machine[1] |
| Manufacturer | — | Axcelis[1] |
| Model | — | 200 ACU[1] |
| Tool type | — | Asher[1] |
| Wafer size | — | 200mm[3] |
| Serial number | — | AU6A356AH[3] |
| Computer system | — | M 200 PC, M 200[4] |
| Part number | — | SC 4572 A[4] |
| Volts | — | 208[4] |
| Amps | — | 30[4] |
| Equipment type | — | Asher[1] |
| Wafer configuration | — | 8 inch[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →