Comparison ledger
ASML Twinscan XT 1400 F, ASML Twinscan XT 1400 F ArF, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ASML | ASML |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML Twinscan XT 1400 | ASML Twinscan XT 1400 |
| Specifications | ||
| Configuration | 193nm (ArF)[1] | 50/60 Hz[4] |
| Make | ASML[1] | — |
| Model | Twinscan XT 1400 F[1] | — |
| Category | Lithography[2] | — |
| Wafer Sizes | 12 inch[1] | — |
| Wavelength | 193 nm[1] | — |
| Process Module | 200 mm[2] | 200 mm[4] |
| Conversion Kit | 300 mm[2] | 300 mm[4] |
| Resolution | 65 nm[3] | — |
| Numerical Aperture | 0.65 to 0.93[3] | — |
| Throughput | 133 wph (@125 exp per wafer)[3] | — |
| Phase | — | 3 Phase[4] |
| Power | — | 49 kVA[4] |
| Full Load Current | — | 79 A/PH[4] |
| Largest Load | — | 27 A/PH[4] |
| Max Interrupt CAp | — | 35 kA[4] |
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