Comparison ledger
Axcelis 200 ACU, Meyer Burger AK 800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | AK 800Meyer Burger |
|---|---|---|
| OEM | Axcelis | Meyer Burger |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Meyer Burger AK 800 |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| 1. Magnetron head | — | Muegge 3kW |
| 8. Gas box | — | BCl3, Cl2, C4F8, CF4, CF3H, |
| 19. Dry pump | — | Ebara EV-S100P |
| 20. Dry Pump | — | Ebara EV-M202N- |
| Vintage | — | 2015 |
| Etch/Asher Vintage | — | 2015 |
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