Comparison ledger
Axcelis 200 ACU, Oxford Instruments Plasmalab 100 ICP 180 RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Plasmalab 100 ICP 180 RIEOxford Instruments |
|---|---|---|
| OEM | Axcelis | Oxford Instruments |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Oxford Instruments Plasmalab 100 |
| Specifications | ||
| Configuration | Parts Machine[1] | With VAT PM-5 Adaptive Pressure Controller[5] |
| Manufacturer | Axcelis[1] | Oxford Instruments[5] |
| Model | 200 ACU[1] | Plasmalab 100 ICP 180[5] |
| Tool type | Asher[1] | Reactive Ion Etcher[5] |
| Wafer size | 200mm[3] | 6 inch[5] |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Voltage | — | 208V, 50/60Hz[5] |
| Category | — | Etch[6] |
| Power | — | 208V, 50/60Hz[5] |
| Adaptive pressure controller | — | VAT PM-5[5] |
| Turbopump controller | — | Adixen ACT 1300M[5] |
| Vacuum pump | — | Leybold D65BCS with oil filter and exhaust filter[5] |
| Gas delivery | — | Gas Box[5] |
| Control computer | — | Control Computer (no HDD)[5] |
| Monitor | — | LCD Monitor[5] |
| Chiller | — | Thermo Neslab Chiller[5] |
| Computer cart | — | Computer Cart[5] |
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