Comparison ledger
Axcelis GSD 100, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 100Axcelis | 160 XPVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | No wafer top-side bar reading | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD | Varian 160 XP |
| Cited variants | — |
|
| Specifications | ||
| High Current | GSD 200 E[2] | — |
| Date of Audit | August 25, 2025[2] | — |
| Loading Configuration | Open Cassette[2] | — |
| Software Version | 6.12.4[2] | — |
| Configuration | Automated Beam tuning & setup w/Eaton Autotune[2] | — |
| Beamline version | Standard[2] | — |
| Energy Range | 160 KeV[2] | — |
| Single Stage Extraction | 80 keV[2] | — |
| Post Accel electrode assembly | 80 -160 keV[2] | — |
| Ion Source Type | ELS[2] | — |
| Source Material | Moly[2] | — |
| Cryo compressors | CTI 9600[2] | — |
| Manufacturer | Axcelis[2] | — |
| Model | GSD 100[2] | — |
| Equipment Type | Implanter[3] | — |
| Wafer Size | 6 inch[2] | — |
| GEM / SECS Interface | Present[2] | — |
| Automated Beam Tuning | Automated Beam tuning & setup w/Eaton Autotune[2] | — |
| Compatibility | 4 cassette compatibility[2] | — |
| Automatic Alignment | Automatic flat or notch alignment capability with buffer cassette[2] | — |
| Process Disk | NV-GSD 200 Series Process Disk with active cooling & chiller[2] | — |
| Beamline Pump | CTI Onboard 10[2] | — |
| End Station Cryo Pump | CTI Onboard 8[2] | — |
| Source Turbo Pump | STP A 2203 C 2[2] | — |
| Gas Connections | Ar, N2[2] | — |
| Remote Disk Chiller | SMC HRS 050-WF-20[2] | — |
| External Facilities connections | Ar, N2[2] | — |
| Wafer size | No wafer top-side bar reading[2] | — |
| Source Turbo Pump (P1) | STP A 2203 C 2[2] | — |
| Beam Line Cryo Pump (P3) | CTI Onboard 10[2] | — |
| End Station Cryo Pump (P2) | CTI Onboard 8[2] | — |
| Ar | Tylan FC-2900 MEP, 5 SCCM[2] | — |
| Ar MFC | Tylan FC-2900 MEP, 5 SCCM[2] | — |
| BF3 Gas | Unit 1660 (SDS), 5 SCCM[2] | — |
| AsH3 Gas | Unit 1660 (SDS), 5 SCCM[2] | — |
| PH3 Gas | Unit 1660 (SDS), 5 SCCM[2] | — |
| Electrical Input | 3-phase, 208 V[3] | — |
| Power Consumption | 50 kVA[3] | — |
| Beam Current | 15 mA[3] | — |
| Output Rating | 160 kV[3] | — |
| Flag Faraday Injector | Present[2] | — |
| Signal Tower | Present[2] | — |
| Direct Drive | Yes[2] | — |
| Electron Shower | Yes[4] | — |
| Cell V6 Control | Yes[4] | — |
| Solaris | Yes[4] | — |
| SDS Gas Box | Yes[4] | — |
| Cassette Compatibility | 4 cassette compatibility[2] | — |
| Automatic Flat/Notch Alignment | Yes, with buffer cassette[2] | — |
| Standard Manuals Included | Yes[2] | — |
| Configuration (160 XP Ion variant) | — | 150mm High Current IMP[1] |
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