Waferpedia

Comparison ledger

0 500versusLA 820

Blue M 0 500, SCREEN LA 820, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
LA 820SCREEN
OEMBlue MSCREEN
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500SCREEN LA 820
Specifications
ManufacturerBlue M[1]—
Model0 500[1]LA 820[2]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]—
OEM—SCREEN / DNS[2]
Product Category—RTP[3]
Wafer Size—6" / 8"[3]
Equipment Description—Rapid annealing[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]en.xinlisemi.comen.xinlisemi.com