Comparison ledger
Blue M 0 500, Thermco 5204 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 500Blue M | 5204 DiffusionThermco |
|---|---|---|
| OEM | Blue M | Thermco |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 500 | Thermco 5204 Diffusion |
| Specifications | ||
| Manufacturer | Blue M[1] | — |
| Model | 0 500[1] | — |
| Asset number | 139866[1] | — |
| Last confirm date | September 10, 2025[1] | — |
| Equipment type | Oven[1] | — |
| Wafer Size | — | 6 inch (150 mm)[2] |
| Flat Zone | — | 40 inches[3] |
| Control System | — | TMX[3] |
| Load Station Length | — | Approximately 10 feet[3] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →