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017-0024-01 Prealignerversus6200 Infinity Mask

Brooks 017-0024-01 Prealigner, EV Group 6200 Infinity Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
6200 Infinity MaskEV Group
OEMBrooksEV Group
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerEV Group 6200 Infinity Mask
Specifications
Manufacturer—EV Group[1]
Model—6200 Infinity Mask[1]
Category—Lithography[1]
Tool type—Mask aligner[2]
Inventory designation—EVG 6200 Infinity Mask Aligner[3]
Vintage—2011[2]
Model designation—EVG 6200 Infinity[2]
017-0024-01 Prealigner entry6200 Infinity Mask entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing