Comparison ledger
Brooks 017-0146-01 Prealigner, Kensington WFH 4 D Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | WFH 4 D Wafer RobotKensington |
|---|---|---|
| OEM | Brooks | Kensington |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Kensington WFH |
| Cited variants | — |
|
| Specifications | ||
| Configuration | — | with aligner[2] |
| Manufacturer | — | Kensington[2] |
| Model | — | WFH 4 D[2] |
| Description | — | wafer robot with aligner[1] |
| Wafer Sizes | — | 6 inch[2] |
| Version | — | 150/200mm[1] |
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