Comparison ledger
Brooks 017-0146-01 Prealigner, OAI Model 32, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | Model 32OAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | OAI Model 32 |
| Specifications | ||
| Product category | — | UV Exposure System[1] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →