Comparison ledger
Brooks 017-0146-01 Prealigner, SUSS MicroTec MA 12, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | MA 12SUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | SUSS MicroTec MA 12 |
| Specifications | ||
| Automation | — | Semi-automated system[1] |
| Maximum wafer size | — | up to 300 mm[1] |
| Functions | — | Mask Alignment, Exposure[1] |
| Product category | — | Mask Aligner (Proximity Exposure)[1] |
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