Waferpedia

Comparison ledger

Eagle APversus1.112 PSL Wafer

Camtek Eagle AP, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Eagle APCamtek
OEMCamtekKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeTaiko wafer adapter—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCamtek Eagle APKLA 1.112 PSL Wafer
Specifications
Voltage220 VAC[1]—
Target Load5 A[1]—
Short Circuit Current Rating5 KA[1]—
Over current Protective30 A[1]—
Wafer sizeTaiko wafer adapter[2]—
Largest Load5 A[2]—
FLA16 A[2]—
Configuration—NIST Traceable[3]
Wafer Size—8 inch[3]
NIST Traceable—True[3]
Compatible Tools—Surfscan 6xy0 and Sp1[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com